World Class Filtration Solutions

Microelectronics

World Class Filtration Solutions

Solar Power Panel Manufacture

Porvair Filtration Group GasPro™ high purity filters are selected for critical gas distribution and delivery systems that are part of the thin film deposition process used to make photovoltaic devices. Our GasPro™ filters for the solar power panel industry are offered in PTFE (Teflon™) membrane, polypropylene, 316L Sinterflo® F sintered metal fibre, 316L Sinterflo® P sintered metal powder, nickel fibre, nickel sintered powder and Hastelloy® C22 sintered powder.

 Applications

  • Process gases used in Plasma Enhanced Chemical Vapour Deposition (PECVD) systems for the manufacture of solar cell panels.
  • Dopant gases used for deposition on CDs, disc drive and optical devices, as well as gases used in modified Chemical Vapour Deposition (CVD) process for optical fibre manufacture.
  • Processing gases for manufacturing the front glass used for photocells and solar panels.

Features and benefits

  • Increased yield and efficiency of thin film deposition process.
  • Protection of process equipment such as vacuum pumps in PECVD process gas handling equipment.
  • Removal of particles - removal of toxic and abrasive particles from exhaust gases.
  • High efficiency filtration of gases - high efficiency filtration of bulk, specialty and onsite generated gases such as N2, H2, Ar, F2, NF3, He and Silane.
  • Last chance filters - POU filters for last chance removal of particles.
  • Maximum cleanliness - deionized water pressure washed and high pressure N2 flush to maximize out of box cleanliness.
  • Application and service environment - filters are available with less stringent wetted hardware surface specifications and with larger filter grades depending on the application and the service environment.

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Where you can see us

11Jul
13Jul
SEMICON West

Moscone Center San Francisco, CA, USA

11Sep
15Sep
Drinktec

Messe Munich, Munich, Germany

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Related Events

Where you can see us

11Jul
13Jul
SEMICON West

Moscone Center San Francisco, CA, USA

11Sep
15Sep
Drinktec

Messe Munich, Munich, Germany

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