World Class Filtration Solutions


World Class Filtration Solutions

Semiconductor Manufacture

Point-of-Use (POU) filters are manufactured in a state of the art Cleanroom using an ISO 9001 Certified Quality System. The filters are precision welded with atmosphere purification. A deionized water flush, followed by a high pressure, filtered nitrogen flush removes particles and reduces particle shedding.

Our POU filters are vacuum dried as needed and the organics are less than 10ppb THC. Particle free, chemically clean, organic free handling and bagging of the POU filters maximizes the out of-package cleanliness for installation in the most demanding microelectronics applications. Exceeding the high purity gas handling filtration requirements for semiconductor processing, Porvair's high quality products are extensively tested to ensure that they meet the critical filtration efficiency, precise flow control and safety requirements for gas delivery systems in semiconductor manufacturing.


  • Wafer production
  • Microelectronics for computers, tablets, cell phones, IoT sensors and control devices
  • Micro-electromechanical systems (MEMS)
  • Data storage devices.

Features and benefits

  • 100% leak checked for safety
    To prevent exposure to flammable, corrosive, toxic and pyrophoric process gases, the filter housings are 100% Helium leak checked to greater than 1x10-9 atm scc/second.
  • Corrosion resistance
    Electro polished to a a defined surface finish to prevent corrosion. The wetted surfaces are electro polished to enhance the Chrome to Iron ratio on the surface layer, so the occurrence of corrosion generated particles is minimized.
  • Particle free manufacturing
    Extensive cleaning and flushing with deionized water and high pressure nitrogen in a Class 100 Cleanroom eliminates particles.
  • Extremely fine filtration media
    Filter efficiency rated at 9 LRV for 0.003μm particles per SEMI F38 and ISO 12500 test methods, will remove any corrosion-generated particles and particles generated from moving parts such as pressure regulators, valves and MFCs used in the gas delivery systems.
  • Mechanical strength
    GasPro™ filter media is tested to insure superior service in manufacturing processes and for tools that often utilize high gas pressure and more rugged service environments.
  • Exceeds standards
    Porvair Filtration Group meets industry standards set by organizations such as the Semiconductor Equipment and Materials International and is a SEMI Corporate Member.

Click here to view our Chinese microelectronics literature. 

For cross-reference lists, please contact















Related Products

Products that can be found in this industry

Latest News

What we've been doing

Upcoming Events

Where you can see us

Aero India 2021

Air Force Station, Yelahanka, Bengaluru

Related Resources

Marketing and Technical Documentation

Corporate BrochureCorporate Brochure (Spanish)Corporate Brochure (German)Corporate Brochure (FR)GasPro TEM 100GasPro TEM 1760GasPro TEM 1780GasPro TEM 200GasPro TEM 300GasPro TEM 1790GasPro TEM 400GasPro TEM 1800GasPro TEM 1900GasPro TEM 500GasPro TEM 700GasPro TEM 2100-3100GasPro TEM 800GasPro TEM 3700Fluorofil™ DatasheetGasPro TEM 3760GasPro TEM 1100GasPro TEM 3780GasPro TEM 3790GasPro TEM 1200GasPro TEM 1300GasPro RF SeriesGasPro TEM 1400GasPro GP-9110GasPro TEM 1500GasPro TEM 1700GasPro TEM-717125GasPro TEM-737125Gas Pro TEM PV1-1400GasPro TEM -100 (CN) DatasheetGasPro TEM - 200 (CN) DatasheetGasPro TEM - 300 (CN) DatasheetGasPro TEM - 400 (CN) DatasheetGasPro TEM - 500 (CN) DatasheetGasPro TEM - 700 (CN) DatasheetGasPro TEM - 800 (CN) DatasheetGasPro TEM - 900 (CN) DatasheetGasPro TEM - 1200 (CN) DatasheetGasPro TEM - 1300 (CN) DatasheetGasPro TEM - 1400 (CN) DatasheetGasPro TEM - 1500 (CN) DatasheetGasPro TEM - 1700 (CN) DatasheetGasPro TEM - 1760 (CN) DatasheetGasPro TEM - 1780 (CN) DatasheetGasPro TEM - 1790 (CN) DatasheetGasPro TEM - 1800 (CN) DatasheetGasPro TEM - 1900 (CN) DatasheetGasPro TEM - 3700 (CN) DatasheetGasPro TEM - 3760 (CN) DatasheetGasPro TEM - 3780 (CN) DatasheetGasPro TEM - 3790 (CN) DatasheetGasPro Flow Restrictors DatasheetGasPro POU Teflon DatasheetGasPro Flow Restrictors DatasheetGasPro POU Sinterflo F DatasheetGasPro High Purity Gasket FiltersGasPro TEM 900PFG Case Study_Gas to liquid refineryLiquiPro F2LiquiPro SHLiquiPro F3LiquiPro SLLiquiPro COLiquiPro BULiquiPro FGLiquiPro MILiquiPro PALiquiPro DILiquiPro PHLiquiPro EZ HousingLiquiPro YS HousingLiquiPro YP Housing

Find a distributor

Search by industry and/or location.

Please select an industry or area

Get in touch

Find the right industry specialist at Porvair Filtration Group


Related Events

Where you can see us

Aero India 2021

Air Force Station, Yelahanka, Bengaluru

© Porvair 2021

To ensure we give you the best experience on our website we use Cookies. You can change your cookie settings at any time. However, if you continue without changing your settings we will presume you are happy to receive all cookies on the Porvair website. Continue