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World Class Filtration Solutions

Solar Power Panel Manufacture

Porvair Filtration Group GasPro™ high purity filters are selected for critical gas distribution and delivery systems that are part of the thin film deposition process used to make photovoltaic devices. Our GasPro™ filters for the solar power panel industry are offered in PTFE (Teflon™) membrane, polypropylene, 316L Sinterflo® F sintered metal fibre, 316L Sinterflo® P sintered metal powder, nickel fibre, nickel sintered powder and Hastelloy® C22 sintered powder.


  • Process gases used in Plasma Enhanced Chemical Vapour Deposition (PECVD) systems for the manufacture of solar cell panels
  • Dopant gases used for deposition on CDs, disc drive and optical devices, as well as gases used in modified Chemical Vapour Deposition (CVD) process for optical fibre manufacture
  • Processing gases for manufacturing the front glass used for photocells and solar panels.

Features and benefits

  • Increased yield and efficiency of thin film deposition process
  • Protection of process equipment such as vacuum pumps in PECVD process gas handling equipment
  • Removal of particles - removal of toxic and abrasive particles from exhaust gases
  • High efficiency filtration of gases - high efficiency filtration of bulk, specialty and onsite generated gases such as N2, H2, Ar, F2, NF3, He and Silane
  • Last chance filters - POU filters for last chance removal of particles
  • Maximum cleanliness - deionized water pressure washed and high pressure N2 flush to maximize out of box cleanliness
  • Application and service environment - filters are available with less stringent wetted hardware surface specifications and with larger filter grades depending on the application and the service environment.

Click here to view our Chinese microelectronics literature.

For cross-reference lists, please contact


Porvair GasPro Microelectronics
Porvair GasPro Microelectronics
Porvair LiquiPro Microelectronics

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