World Class Filtration Solutions
Porvair Filtration Group GasPro™ filters provide high efficiency removal of sub-micron particles when handling the process gases used in the manufacture of High Brightness Light Emitting Diodes (HBLEDs) for lighting, display and electronic applications. Thin film, substrate and device manufacturing processes require mechanically robust filters with superior corrosion resistance, elevated temperature resistance, lower pressure drop and higher dirt loading capacity to increase the overall process efficiency and LED brightness.
The filters are extensively cleaned and dried to low parts per billion (ppb) levels to minimize any potential interactions with the process gases.
GasPro™ filters are available in PTFE membrane, 316L Sinterflo® stainless steel, nickel and Hastelloy® C22 Sinterflo® P powder metal to offer superior corrosion resistant materials for handling reactive process gases such as ammonia, CH4, CF4 hydrogen, N2O, NF3, oxygen and silane and inert gases such as argon, helium and nitrogen.
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