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In-Line and Last Chance Filters

World Class Filtration Solutions

GasPro™ In-Line Gas Filters

Porvair GasPro™ high purity gas filtration products protect critical processes from potential defect causing, yield limiting particles. These in-line gas filters are installed at the point-of-source for complete line protection or at the point-of-use to protect etch, CVD, PVD, thermal, and other critical dry processes.

Regardless of process gas and flow, Porvair's broad range of in-line gas filter options can meet the requirement. Porvair filtration medias include PTFE and sintered 316L stainless steel, nickel, and Hastelloy® C22 in electro-polished 316L stainless steel (or Hastelloy® C22) housings.

To fit a wide range of applications, GasPro™ filters are available with a wide variety of end connections and sizes. Fitting choices include male and female face seal (VCR®), butt weld, compression, and NPT connections, depending on the filter. Fitting sizes can range from ¼” to 1 ½”. Metric sizes are available upon request. 

Features and benefits

  • Superior filter efficiency
    Our porous PTFE and sintered metal filters are proven to provide greater than 9 LRV (99.9999999%) particle retention efficiency at 0.003μm (3 nanometers) and at the most penetrating particle size of 0.8 microns.
  • Service in severe environments
    Porous Sinterflo® sintered metal media provides excellent mechanical strength, enhanced corrosion resistance and elevated temperature service in severe environments. PTFE membranes are highly compatible with every process gas.
  • Temperature resistance
    GasPro™ filters are available for elevated temperature service up to 500°C (930°F) and an all Hastelloy® C22 construction is rated for 700°C (1290°F) in inert gas applications.
  • Cleanliness and best in class quality
    Our point of use filters are manufactured in a Class 100 Cleanroom using an ISO 9001 Certified Quality System. This insures particle free, chemically clean, organic free handling and bagging, maximizing the out-of-package cleanliness. A DI water flush and a high pressure, 0.003μm filtered nitrogen flush removes particles and prevents particle shedding. Most GasPro™ filters are vacuum dried to less than 10ppb moisture and the organics are less than 10ppb THC.
In Line and Last Chance Filters Porvair
Sinterflo Media Porvair
In Line and Last Chance Filters Porvair

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