Gaspro In-Line Gasket Filters

Porvair’s GasPro^TM high purity gas filtration products are optimized for the protection of critical valves, pressure regulators, mass flow controllers and other gas panel components used in microelectronics gas delivery equipment.

GasPro™ cleanroom-packaged compact filters are suitable for operation in harsh environments, including high pressure (up to 100psid@68°F (20°C)) and high temperature (850°F (455°C)), safeguarding critical components against particle damage.

These install into ¼", ⅜" and ½" face vacuum seal (VCR^®) fittings.

 

Features and Benefits

• Compact, in-line design

Designed with minimal surface area, suitable for retrofitting into gas panels while maintaining the overall gas panel footprint.

• Economical

No filter housing is required, therefore they are easily installed inside of standard face seal fittings by replacing the existing gasket.

• Filtration efficiency removal ratings

97% efficient particle retention at >0.3μm.

• Robust construction

Gaskets have a 10Ra surface finish. Porous sintered powder metal filters are available in 316L stainless steel, with 0.003μm filter removal rating.

• Service in severe environments

Excellent corrosion resistance and compatible with a wide range of processing gases. Superior mechanical strength for high pressure (100psid@68°F (20°C)) and elevated temperature resistance (850°F (455°C)) for inert gas applications.

• Cleanliness

Precision welded in a specially designed glove box with atmosphere purification, pressure flushed with 0.003μm filtered nitrogen, no particle shedding, handled and packaged in Class 100 Cleanroom.

• Best in class quality

Manufacturing in a state of the art cleanroom using ISO 9001 Certified Quality System.

For cross-reference lists, please contact boise.sales@porvairfiltration.com