Microelectronics

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Porvair manufactures a wide range of high purity porous media and reliable, high efficiency filtration products for both gas and liquid applications.

Gas Handling

The GasPro™ range of products ensure extreme cleanliness in critical semiconductor and microelectronics gas handling and delivery applications, including:

Gas safety management
Exhaust venting systems
Flow control
Mass flow control
Needle valve replacement
Laminar flow diffusing
Pressure snubbing
Flame arresting.

We can custom engineer solutions for the most demanding applications, using porous PTFE membrane, Sinterflo^® F sintered metal fibre and Sinterflo^® P sintered metal powder media.

Materials of construction

Our wide range of porous media includes a variety of pore sizes and material properties. These high efficiency filters are offered in:

PTFE membrane
316L stainless steel Sinterflo® F sintered metal fibre
316L stainless steel Sinterflo® P sintered metal powder
Nickel Sinterflo® F sintered metal fibre
Nickel Sinterflo® P sintered metal powder
Hastelloy® C22 Sinterflo® P sintered metal powder.

Service in severe environments

Our GasPro^TMfilter media provides excellent mechanical strength, enhanced corrosion resistance and elevated temperature service in severe environments.

Mechanical strength

The filter media and supporting structure are designed to withstand the highest pressure differential. The mechanical strength of the 316L stainless steel filter housings will provide reliable service.

Temperature resistance

316L stainless steel or nickel construction provides elevated temperature service up to 500°C (930°F). Hastelloy^® C22 construction is rated for 700°C (1290°F) in reducing or inert gas applications. With PTFE filter media, the filters are rated up to 120°C (250°F).

Corrosion resistance

Our GasPro^TM filter hardware features electro polished surfaces to prevent corrosion and particle formation for years of reliable service. Robust construction and excellent corrosion resistance allow for service in a wide range of processing gases.

High Purity Chemical Filtration

Our LiquiPro™ range focuses on the delivering improved performance within the semiconductor industries, by reducing process defects and to achieve an increased lifespan of the filter. The products are suitable for the following applications:

CMP
PVD copper plating
Wet etch clean
Photolitho
Chemical delivery system
General Filtration
Final Cleaning and DI Water filtration
Plating, Etching, Stripper chemicals
Chemicals of acid, bases and solvents (selected applications)
Engineering or Equipment companies requiring cartridge housings

The LiquiPro™ range includes cartridges, capsules and their respective housings. The Fltration hardware format comes in standard cartridges as well as disposable or capsule form. The filter media of Polypropylene (PP), Polyethersulfone (PES), Fluoropolymer (PTFE), Nylon (NL), PVDF are available at selected pore sizes.