World Class Filtration Solutions

Microelectronics

World Class Filtration Solutions

Microelectronics

Porvair Filtration Group manufacture a wide range of high purity porous media for OEMs and reliable, high efficiency filtration products. These insure extreme cleanliness in critical semiconductor and microelectronics gas handling and delivery applications.

These include:

  • Gas safety management
  • Exhaust venting systems
  • Flow control
  • Mass flow control
  • Needle valve replacement
  • Laminar flow diffusing
  • Pressure snubbing
  • Flame arresting

We can custom engineer solutions for the most demanding applications, using porous PTFE membrane, Sinterflo® F sintered metal fibre and Sinterflo® P sintered metal powder media.

Materials of Construction

Our wide range of porous media includes a variety of pore sizes and material properties. These high efficiency filters are offered in:

  • PTFE membrane
  • 316L stainless steel Sinterflo® F sintered metal fibre
  • 316L stainless steel Sinterflo® P sintered metal powder
  • Nickel fibre and sintered powder
  • Hastelloy® C22 sintered powder

Service in Severe Environments

Our GasPro™ TEM filter media provides excellent mechanical strength, enhanced corrosion resistance and elevated temperature service in severe environments.

Mechanical strength

The filter media and supporting structure are designed to withstand the highest pressure differential. The mechanical strength of the 316L stainless steel filter housings will provide reliable service for over 100,000 cycles in high pressure service (258bar (3750psig) @ 20°C (68°F)).

Temperature Resistance

316L stainless steel or nickel construction provides elevated temperature service up to 500°C (930°F). Hastelloy® C22 construction is rated for 700°C (1290°F) in reducing or inert gas applications. With PTFE filter media, the filters are rated up to 120°C (250°F).

Corrosion Resistance

Our GasPro™ TEM filter hardware features a greater than 10Ra electro polished surfaces to prevent corrosion and particle formation for years of reliable service. Robust construction and excellent corrosion resistance allow for service in a wide range of etching and CVD processing gases.

Related Products

Products that can be found in this industry

Related Resources

Marketing and Technical Documentation

Find a distributor

Search by industry and/or location.

Banner Industries

5 Upper Aljunied Link #01-02
Quartz Industrial Building
367903
Singapore

Banner Industries | Austin Region

16074 Central Commerce Drive
Suite B-103
Pflugerville,
TX 78660
USA

Phone: 512-251-6210

Fax: 512-251-6211

Email: AustinSales@bannerindustries.com

Website: www.bannerindustries.com

Banner Industries | Dallas Region

1354 Exchange Drive
Richardson,
TX 75081
USA

Phone: 972-406-1900

Fax: 972-406-1975

Email: DallasSales@bannerindustries.com

Website: www.bannerindustries.com

Banner Industries | Malta, New York

20 Tech Trail
Suite 305
Malta,
NY 12020
USA

Phone: 518-899-6400

Fax: 518-899-6401

Email: MaltaSales@bannerindustries.com

Website: www.bannerindustries.com

Banner Industries | Mid Atlantic

10100 Nokesville Road
Manassas,
VA 20110
USA

Phone: 703-392-1320

Fax: 703-392-1322

Email: MidAtlanticSales@bannerindustries.com

Website: www.bannerindustries.com

Banner Industries | Mountain States

4000 North Flash Drive
Trailer T-1
Lehi,
UT 84043
USA

Phone: 801-816-0200

Fax: 801-816-1811

Email: MountainStateSales@bannerindustries.com

Website: www.bannerindustries.com

Banner Industries | New England

1 Industrial Drive
Danvers,
MA 01923
USA

Phone: 978-777-0080

Fax: 978-777-0440

Email: NewEnglandSales@bannerindustries.com

Website: www.bannerindustries.com

Banner Industries | North West

7205 NW Evergreen Parkway
Building E, Suite 900
Hillsboro,
OR 97124
USA

Phone: 503-924-8377

Fax: 503-924-8378

Email: NorthWestSales@bannerindustries.com

Website: www.bannerindustries.com

Banner Industries | South East

1601 E. Geer Street
Unit B
Durham,
NC 27704
USA

Phone: 919-956-8545

Fax: 919-956-8305

Email: SouthEastSales@bannerindustries.com

Website: www.bannerindustries.com

Banner Industries | South West

8350 S. Kyrene Road
Unit 108
Tempe,
AZ 85284
USA

Phone: 480-961-1111

Fax: 480-961-1118

Email: SouthWestSales@bannerindustries.com

Website: www.bannerindustries.com

Banner Industries | Tri State

754 Roble Road
Unit 130
Allentown,
PA 18109
USA

Phone: 610-231-0338

Fax: 610-231-0464

Email: TriStateSales@bannerindustries.com

Website: www.bannerindustries.com

Ever Team International Corp.

Room #2203, Building 1, No.789 Tianshan Rd., ChangNing District (Tianshan Commercial Building)
Shanghai
China 200051

Phone: +86 216 252 0638 / +86 216 252 0678

Fax: +86 216 252 4809

Email: etsales1@everteam.com.tw

Ewald Associates, Inc.

48531 Warm Springs Blvd., Bldg. 415
Fremont,
California 94539
USA

Phone: 510 490-3900

Fax: 510 490-3916

Email: sales@ewaldonline.com

Website: http://ewaldonline.com/

M.P Tech Co., LTD

Ansan Digitalpark,
A-4002, 1123
Silgil-Dong,
Danwon-gu, Ansan-Citu
Kyunggi-do,
Korea

Phone: +82 313 108 611

Fax: +82 635 728 726

Email: bumrim@hotmail.com

SilPac

1850 Russell Ave
Santa Clara,
CA 95054
USA

Phone: 408-492-0011

Email: sales@silpac.net

Website: www.silpac.net

SimPure Technology (Shanghai) Co., Ltd

1st Floor, #1 Bldg, No. 18
Lane 99 ChunGuang Rd.
MinHang District
Shanghai China 201108

Phone: +(86) 21 5442 7619

Fax: +(86) 21 5482 2239 (X807)

Email: mail@simpuretech.com

Website: www.simpuretech.com

S.P.S. Ltd

Aghmhor Annex
Whitmuir,Selkirk
TD7 4PZ
UK

Phone: +44 1750 725712

Email: info@sps-europe.com

Website: www.sps-europe.com

SPS-Europe B.V.

Midden Engweg 41
NL-3882 TS
Putten
The Netherlands

Phone: +31 341 360 590

Fax: info@sps-europe.com

Email: www.sps-europe.com

SPS-Europe GmbH

Rosenstrasse 10
D-85053 Ingolstadt
Germany

Phone: +49 841 370 530

Fax: +49 841 3705322

Email: info@sps-europe.com

Website: www.sps-europe.com

Upcoming Events

Where you can see us

11Jul
13Jul
SEMICON West

Moscone Center San Francisco, CA, USA

11Sep
15Sep
Drinktec

Messe Munich, Munich, Germany

Latest News

What we've been doing

Get in touch

Find the right industry specialist at Porvair Filtration Group

Locations

Related Events

Where you can see us

11Jul
13Jul
SEMICON West

Moscone Center San Francisco, CA, USA

11Sep
15Sep
Drinktec

Messe Munich, Munich, Germany

© Porvair 2017

To ensure we give you the best experience on our website we use Cookies. You can change your cookie settings at any time. However, if you continue without changing your settings we will presume you are happy to receive all cookies on the Porvair website. Continue