GasPro™ TEM Series gas compatibility chart

Product series key

Product Group

Type of Material

Filter Series

1

PTFE & Polypro

TEM-100, TEM-200, TEM-300, TEM-400, TEM-500, TEM-800

2

All-Fluoropolymer

TEM-900, TEM-1300 , TEM-1900, TEM-1800, TEM-1500, TEM-1400, TEM-1200, TEM-1100

3

Stainless Steel

TEM-1700, 817125, 717125

4

Nickel

TEM-3700, 837125, 737125

Gas compatibility guide

Gas

Recommended Product Groups

Air

1,2,3,4

Ammonia (NH3)

1,2,3,4

Argon(Ar)

1,2,3,4

Arsine (AsH3)

1,2,3,4

Boron Trichloride (BCl3)

1,2,4

Boron Trifluoride (BF3)

1,2,4

Carbon Monoxide (CO)

1,2,3

Carbon Dioxide (CO2)

1,2,3,4

Carbon Tetrachloride (CCl4)

2,3,4

Carbon Tetrafluoride (CF4)

2,3,4

Chlorine (Cl2)

2,4

Chlorine Trifluoride (ClF3)

2,4

Diborane (B2H6)

1,2,3,4

Dichlorosilane (SiH2Cl2)

2,4

Hexafluoroethane (C2F6)

2,3,4

Halocarbon 13 (CClF3)

1,2,3,4

Halocarbon 14 (CF4)

1,2,3,4

Halocarbon 23 (CHF3)

1,2,3,4

Halocarbon 115 (C2ClF5)

1,2,3,4

Halocarbon 116 (C2F6)

1,2,3,4

Germane (GeH4)

1,2,3,4

Helium (He)

1,2,3,4

Hydrogen (H2)

1,2,3,4

Hydrogen Bromide (HBr)

1,2,4

Hydrogen Chloride (HCl)

1,2,4

Hydrogen Fluoride (HF)

2,4

Hydrogen Sulfide (H2S)

1,2,3,4

Neon (Ne)

1,2,3,4

Nitrogen (N2)

1,2,3,4

Nitrogen Trifluoride (NF3)

2,3,4

Nitrous Oxide (N2O)

1,2,3,4

Oxygen (O2)

2,3,4

Ozone (O3)

2

Phosphine (PH3)

1,2,3

Phosphorous Trifluoride (PF3)

1,2,4

Phosphorous Pentachloride (PCl5)

1,2,3,4

Phosphorous Pentafluoride (PF5)

2,3,4

Silane (SiH4)

2,3

Silicon Tetrachloride (SiCl4)

1,2,4

Silicon Tetrafluoride (SiF4)

1,2,4

Sulfur Hexafluoride (SF6)

1,2,3,4

Tetraethyl Orthosilicate (TEOS)

1,2,3,4

Trichlorosilane (SiHCl3)

1,2,4

Trimethyl Borane ((CH3)3B)

1,2,3,4

Trimethyl Phosphate ((CH3)3PO4)

1,2,3,4

Tungsten Hexafluoride (WF6)

2,4

Xenon (Xe)

1,2,3,4