Gas compatibility guide
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Gas
|
Recommended Product Groups
|
|
Air
|
1,2,3,4
|
|
Ammonia (NH3)
|
1,2,3,4
|
|
Argon(Ar)
|
1,2,3,4
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|
Arsine (AsH3)
|
1,2,3,4
|
|
Boron Trichloride (BCl3)
|
1,2,4
|
|
Boron Trifluoride (BF3)
|
1,2,4
|
|
Carbon Monoxide (CO)
|
1,2,3
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Carbon Dioxide (CO2)
|
1,2,3,4
|
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Carbon Tetrachloride (CCl4)
|
2,3,4
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Carbon Tetrafluoride (CF4)
|
2,3,4
|
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Chlorine (Cl2)
|
2,4
|
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Chlorine Trifluoride (ClF3)
|
2,4
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Diborane (B2H6)
|
1,2,3,4
|
|
Dichlorosilane (SiH2Cl2)
|
2,4
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|
Hexafluoroethane (C2F6)
|
2,3,4
|
|
Halocarbon 13 (CClF3)
|
1,2,3,4
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Halocarbon 14 (CF4)
|
1,2,3,4
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|
Halocarbon 23 (CHF3)
|
1,2,3,4
|
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Halocarbon 115 (C2ClF5)
|
1,2,3,4
|
|
Halocarbon 116 (C2F6)
|
1,2,3,4
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Germane (GeH4)
|
1,2,3,4
|
|
Helium (He)
|
1,2,3,4
|
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Hydrogen (H2)
|
1,2,3,4
|
|
Hydrogen Bromide (HBr)
|
1,2,4
|
|
Hydrogen Chloride (HCl)
|
1,2,4
|
|
Hydrogen Fluoride (HF)
|
2,4
|
|
Hydrogen Sulfide (H2S)
|
1,2,3,4
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Neon (Ne)
|
1,2,3,4
|
|
Nitrogen (N2)
|
1,2,3,4
|
|
Nitrogen Trifluoride (NF3)
|
2,3,4
|
|
Nitrous Oxide (N2O)
|
1,2,3,4
|
|
Oxygen (O2)
|
2,3,4
|
|
Ozone (O3)
|
2
|
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Phosphine (PH3)
|
1,2,3
|
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Phosphorous Trifluoride (PF3)
|
1,2,4
|
|
Phosphorous Pentachloride (PCl5)
|
1,2,3,4
|
|
Phosphorous Pentafluoride (PF5)
|
2,3,4
|
|
Silane (SiH4)
|
2,3
|
|
Silicon Tetrachloride (SiCl4)
|
1,2,4
|
|
Silicon Tetrafluoride (SiF4)
|
1,2,4
|
|
Sulfur Hexafluoride (SF6)
|
1,2,3,4
|
|
Tetraethyl Orthosilicate (TEOS)
|
1,2,3,4
|
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Trichlorosilane (SiHCl3)
|
1,2,4
|
|
Trimethyl Borane ((CH3)3B)
|
1,2,3,4
|
|
Trimethyl Phosphate ((CH3)3PO4)
|
1,2,3,4
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|
Tungsten Hexafluoride (WF6)
|
2,4
|
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Xenon (Xe)
|
1,2,3,4
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