25 Feb 2021
GasPro ™ TEM-2260 series filters are specifically designed for the filtration of semiconductor gases when ultra-high flow rates are required. This all-welded assembly will deliver 0.003 micron particle retention where a high flow rate is required and space is limited.
A PTFE membrane and polypropylene supported cartridge is enclosed in a 316L stainless steel electropolished welded housing. Final assembly is purged with filtrated nitrogen for initial cleanliness.
• General and process inert facilities gases.
• Clean-dry air (CDA*) for critical processes including front opening unified pod (FOUP) cleaning and photolithography.
View the datasheet for more information.
Marketing and Technical Documentation