World Class Filtration Solutions

High Purity Flow Restrictors and Diffusers

World Class Filtration Solutions

GasPro™ In-Line Gasket Filters

Porvair's GasPro™ high purity gas filtration products are optimised for the protection of critical valves, pressure regulators, mass flow controllers and other gas panel components used in microelectronics gas delivery equipment.

GasPro™ cleanroom-packaged compact filters are suitable for operation in harsh environments, including high pressure (up to 100psid@68°F (20°C)) and high temperature (850°F (455°C)), safeguarding critical components against particle damage.

These install into ¼", ⅜" and ½" face vacuum seal (VCR®) fittings.

Features and benefits

  • Compact, in-line design
    Designed with minimal surface area, suitable for retrofitting into gas panels while maintaining the overall gas panel footprint.
  • Economical
    No filter housing is required, therefore they are easily installed inside of standard face seal fittings by replacing the existing gasket.
  • Filtration efficiency removal ratings
    9 Log (99.9999999%) particle retention efficiency at 0.003μm and 0.4μm.
  • Robust construction
    Gaskets have a 10Ra surface finish. Porous sintered powder metal filters are available in 316L stainless steel, Hastelloy® C22 and nickel with 0.003μm filter removal rating. Laminated wire mesh filters are available in 316L stainless steel with 0.4μm filter removal rating.
  • Service in severe environments
    Excellent corrosion resistance and compatible with a wide range of processing gases. Superior mechanical strength for high pressure (100psid@68°F (20°C)) and elevated temperature resistance (850°F (455°C)) for inert gas applications.
  • Cleanliness
    Precision welded in a specially designed glove box with inert atmosphere purification, pressure flushed with 0.003μm filtered nitrogen, no particle shedding, handled and packaged in Class 100 cleanroom.
  • Best in class quality
    Manufacturing in state of the art cleanroom using ISO 9001 certified quality system. 

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