Porvair’s GasProTM high purity gas filtration products are optimized for the protection of critical valves, pressure regulators, mass flow controllers and other gas panel components used in microelectronics gas delivery equipment.
GasPro™ cleanroom-packaged compact filters are suitable for operation in harsh environments, including high pressure (up to 100psid@68°F (20°C)) and high temperature (850°F (455°C)), safeguarding critical components against particle damage.
These install into ¼", ⅜" and ½" face vacuum seal (VCR®) fittings.
Designed with minimal surface area, suitable for retrofitting into gas panels while maintaining the overall gas panel footprint.
No filter housing is required, therefore they are easily installed inside of standard face seal fittings by replacing the existing gasket.
97% efficient particle retention at >0.3μm.
Gaskets have a 10Ra surface finish. Porous sintered powder metal filters are available in 316L stainless steel, with 0.003μm filter removal rating.
Excellent corrosion resistance and compatible with a wide range of processing gases. Superior mechanical strength for high pressure (100psid@68°F (20°C)) and elevated temperature resistance (850°F (455°C)) for inert gas applications.
Precision welded in a specially designed glove box with atmosphere purification, pressure flushed with 0.003μm filtered nitrogen, no particle shedding, handled and packaged in Class 100 Cleanroom.
Manufacturing in a state of the art cleanroom using ISO 9001 Certified Quality System.