Gaspro In-Line Gasket Filters

Porvair’s GasProTM high purity gas filtration products are optimized for the protection of critical valves, pressure regulators, mass flow controllers and other gas panel components used in microelectronics gas delivery equipment.

GasPro™ cleanroom-packaged compact filters are suitable for operation in harsh environments, including high pressure (up to 100psid@68°F (20°C)) and high temperature (850°F (455°C)), safeguarding critical components against particle damage.

These install into ¼", ⅜" and ½" face vacuum seal (VCR®) fittings.

 

Features and Benefits

  • Compact, in-line design

Designed with minimal surface area, suitable for retrofitting into gas panels while maintaining the overall gas panel footprint.

  • Economical

No filter housing is required, therefore they are easily installed inside of standard face seal fittings by replacing the existing gasket.

  • Filtration efficiency removal ratings

97% efficient particle retention at >0.3μm.

  • Robust construction

Gaskets have a 10Ra surface finish. Porous sintered powder metal filters are available in 316L stainless steel, with 0.003μm filter removal rating.

  • Service in severe environments

Excellent corrosion resistance and compatible with a wide range of processing gases. Superior mechanical strength for high pressure (100psid@68°F (20°C)) and elevated temperature resistance (850°F (455°C)) for inert gas applications.

  • Cleanliness

Precision welded in a specially designed glove box with atmosphere purification, pressure flushed with 0.003μm filtered nitrogen, no particle shedding, handled and packaged in Class 100 Cleanroom.

  • Best in class quality

Manufacturing in a state of the art cleanroom using ISO 9001 Certified Quality System.

For cross-reference lists, please contact boise.sales@porvairfiltration.com

 

 

Porvair GasPro Microelectronics
Porvair LiquiPro Microelectronics
Porvair GasPro Microelectronics

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